@article {Endo:1 March 2000:0921-8831:99,
	author = "Endo, Yoshishige",
	author = "Ono, Masahiko",
	author = "Tsubaki, Junichiro",
	title = "Study of the process for forming microscopic surface bumps with ultra-fine particles",
	journal = "Advanced Powder Technology",
	volume = "11",
	year = "1 March 2000",
	abstract = "The flying height of magnetic heads in hard disk drives has been markedly reduced in proportion to an increase in the recording density, resulting in a large head-disk stiction. One of the techniques for overcoming this problem is to use laser texturing. The laser can create bumps with a typical height of 20-30 nm and a diameter of 10 &#956;m, although a small bump diameter is needed to obtain better tribological performance. We therefore studied a precise bump diameter control process with ultra-fine particles (UFPs) of SiO<SUB>2</SUB> and a dry etching process. UFPs of 0.3 &#956;m diameter were coated on a disk surface by dipping or an ink-jet method and the surface was etched by oxygen. After removing the UFPs, the bumps formed were measured to have a height of 10-20 nm and a diameter of 0.21 &#956;m. The diameter was about the same as that of the UFPs.",
	pages = "99-112(14)",
	url = "http://www.ingentaconnect.com/content/vsp/apt/2000/00000011/00000001/art00009"
	doi = "doi:10.1163/156855200750172484"
}