@article {Fu:22 October 2002:0257-8972:165,
	author = "Fu Y.",
	author = "Sun C.Q.",
	author = "Du H.",
	author = "Yan B.",
	title = "From diamond to crystalline silicon carbonitride: effect of introduction of nitrogen in CH4/H2 gas mixture using MW-PECVD",
	journal = "Surface and Coatings Technology",
	volume = "160",
	year = "22 October 2002",
	abstract = "",
	pages = "165-172(8)",
	url = "http://www.ingentaconnect.com/content/els/02578972/2002/00000160/00000002/art00418"
	doi = "doi:10.1016/S0257-8972(02)00418-8"
}