@article {Kim:August 1996:0254-0584:155,
	author = "Kim S.T.",
	author = "Kim J.W.",
	author = "Jung S.W.",
	author = "Shin J.S.",
	author = "Lee W.J.",
	author = "Ahn S.T.",
	title = "Electrical properties of PZT thin films deposited by electron cyclotron resonance plasma enhanced chemical vapor deposition",
	journal = "Materials Chemistry and Physics",
	volume = "45",
	year = "August 1996",
	abstract = "",
	pages = "155-158(4)",
	url = "http://www.ingentaconnect.com/content/els/02540584/1996/00000045/00000002/art80094"
	doi = "doi:10.1016/0254-0584(96)80094-0"
}