Changes in chemical behavior of thin film lead zirconate titanate during Ar+-ion bombardment using XPS

Authors: Kim J.-N.; Shin K.-S.; Kim D.-H.; Park B.-O.1; Kim N.-K.; Cho S.-H.

Source: Applied Surface Science, Volume 206, Number 1, 15 February 2003 , pp. 119-128(10)

Publisher: Elsevier

Keywords: [Physical Astronomy Classification Scheme] 61.80.Jh; [Physical Astronomy Classification Scheme] 68.55.Nq; Lead zirconate titanate (PZT); Ar+-ion bombardment; X-ray photoelectron spectroscopy (XPS); Relative atomic sensitivity factors (ASF)

Language: English

Document Type: Research article

Affiliations: 1: Department of Inorganic Materials Engineering, Kyungpook National University, KNU, 702-701, Daegu, South Korea

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