@article {Chiba:28 May 1997:0040-6090:6, author = "Chiba T.", author = "Itoh K.-I.", author = "Matsumoto O.", title = "Deposition of BaTiO3 thin films by plasma MOCVD", journal = "Thin Solid Films", volume = "300", year = "28 May 1997", abstract = "", pages = "6-10(5)", url = "http://www.ingentaconnect.com/content/els/00406090/1997/00000300/00000001/art09506" doi = "doi:10.1016/S0040-6090(96)09506-5" }